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VWF Interactive Tools Tutorial
Cross Section Simulation of an n+/p+ region of an IC
This tutorial document will introduce you to process and device
simulation using the Silvaco VWF interactive tools. It is assumed that
you are familiar with basic concepts of Silicon device processing and
the basic operation of MOS transistors.
Each on-line page of this tutorial begins and ends with hypertext links
to this page (the index page), the overview page for the topic currently
being covered in the tutorial and the next page of the tutorial. You
may use these links to move through the tutorial.
There are several links through out the tutorial to related topics which
may be followed if the topic is of particular interest to you.
This tutorial is organized into the following broad topics:
- Table of Contents (this page)
- About Silvaco
Data Systems, Inc.
- Getting Started: covering invoking
DeckBuild, the master application of the VWF Interactive Tools, and
loading an example input deck.
- Process Simulation: covering the
simulation of a simple LDD MOS process using Silvaco's Athena process
simulator.
- Device Simulation: covering MOS
transistor device simulation to extract the device parameters Vt, Beta
and Theta using Silvaco's device simulator Atlas.
Comments and Suggestions
Comments or suggestions relating to this tutorial are welcome
and should be sent to support@silvaco.com.
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